Three-dimensional shape measuring apparatus

摘要

A three-dimensional shape measuring apparatus which has an improved arrayed confocal imaging system. A three-dimensional shape measuring apparatus using a confocal imaging system which has a new means for changing the distance in the Z direction between the object and the object-position-in-focus, instead of an object stage moved in the Z direction. This means shifts the object-position-in-focus in the Z direction by refraction. One means inserts a plurality of transparent flat plates between the objective lens and the object-position-in-focus in turn. Another means uses a transparent flat plate made of a material for which the refractive index changes according to the voltage applied and is disposed between the object and the object-position-in-focus. A three-dimensional shape measuring apparatus using a confocal imaging system wherein an image processor estimates the position from which the intensity of the reflected light for each pixel of the confocal image becomes maximum by interpolation of a value from the curve of the relationship between the intensity of light detected and the distance from the object-position-in-focus to an object point.