发明名称 Stage utilizing ultrasonic motor and printer utilizing the stage
摘要 <p>It is an object to improve positioning accuracy and to provide a simple and compact mechanism which can be used in an environment where magnetization is avoided. A stage including a first moving body which is movable in one direction and a second moving body which moves in one direction with said first moving body and which is movable in another direction different from said one direction, comprising: a first piezoelectric actuator or ultrasonic motor which is put in contact with said first moving body for moving the moving body in said one direction; and a second piezoelectric actuator or ultrasonic motor which is put in contact with said second moving body for moving the moving body in said other direction. &lt;IMAGE&gt;</p>
申请公布号 EP0938144(A2) 申请公布日期 1999.08.25
申请号 EP19990301264 申请日期 1999.02.22
申请人 SEIKO INSTRUMENTS INC. 发明人 IINO, AKIHIRO;KASUGA, MASAO
分类号 H01L41/09;(IPC1-7):H01L41/09 主分类号 H01L41/09
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