发明名称 |
Stage utilizing ultrasonic motor and printer utilizing the stage |
摘要 |
<p>It is an object to improve positioning accuracy and to provide a simple and compact mechanism which can be used in an environment where magnetization is avoided. A stage including a first moving body which is movable in one direction and a second moving body which moves in one direction with said first moving body and which is movable in another direction different from said one direction, comprising: a first piezoelectric actuator or ultrasonic motor which is put in contact with said first moving body for moving the moving body in said one direction; and a second piezoelectric actuator or ultrasonic motor which is put in contact with said second moving body for moving the moving body in said other direction. <IMAGE></p> |
申请公布号 |
EP0938144(A2) |
申请公布日期 |
1999.08.25 |
申请号 |
EP19990301264 |
申请日期 |
1999.02.22 |
申请人 |
SEIKO INSTRUMENTS INC. |
发明人 |
IINO, AKIHIRO;KASUGA, MASAO |
分类号 |
H01L41/09;(IPC1-7):H01L41/09 |
主分类号 |
H01L41/09 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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