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发明名称
SPUTTERING DEVICE FOR FILM FORMATION
摘要
申请公布号
JPH11229131(A)
申请公布日期
1999.08.24
申请号
JP19980050034
申请日期
1998.02.17
申请人
NIKON CORP
发明人
AKIYAMA TAKAYUKI
分类号
C23C14/34;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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