CARRIER BOX FOR SEMICONDUCTOR SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a carrier box for semiconductor substrates which has a practically efficient function of removing particles and gas toxic components. SOLUTION: A semiconductor substrate box is a gas purification unit formed by integrating a gas purification device A-2 which purifies the box inside by using photoelectron and photocatalyst by optical irradiation or a battery mounted power supply device with charging function for feeding the power to the gas purification device with a semiconductor substrate carrier box 21 having an opening/closing mechanism for putting in/out the semiconductors. This gas purification device A-2 is provided with an ultraviolet ray source 27 for optical irradiation, a photoelectron emission material 29 for emitting the photoelectron, and photocatalyst 28, and when it is integrated with a power supply device, a heat radiating body for transmitting the heat generated in the power supply device to the gas purification device A-2 is preferably provided therein and the material of the carrier box 21 may be synthetic resin.