| 摘要 |
PROBLEM TO BE SOLVED: To speedily stop an operation of a power source without using a feedback cable, when a quantity of liquid around an outer duct changes. SOLUTION: A high frequency power source 10 controls switching on and off of an output power in accordance with an input impedance of a circuit subsequent to its output terminal and outputs a high frequency voltage, and the output of the high frequency power source 10 is supplied to a matching circuit 13 through a coaxial cable 20 comprised of a pair of transmission lines 11, 12. The matching circuit 13 performs matching adjustment of the high frequency voltage supplied from the high frequency power source 10 through the transmission lines 11, 12 and it is supplied to an excitation coil 22 through the coaxial cable 21 comprised of transmission lines 14, 15. The excitation coil 22 is wound on an electrodeless discharge lamp 23. The electrodeless discharge lamp 23 and the excitation coil 22 are inserted into a treatment tank containing injected liquid for photochemical treatment with both of them contained in an outer conduit 24. |
