发明名称 SPECTROPHOTOMETER
摘要 <p>PROBLEM TO BE SOLVED: To measure reflectance and transmittance by a simple method even when an illumination beam has a high incident angle. SOLUTION: At first, a sample SA and a reference RE are set in a sample room C3. Illumination light is then projected from a light source section 2 through a spectral section 3 and a beam forming optical system 4 onto the surface of the sample SA. The illumination light projected onto the surface of the sample SA is set with a high incident angle at an angle adjusting section 5. The high incident angle means an incident angle to the surface of the sample SA exceeding about 45 deg.. Open angle of the illumination beam incident to the surface of the sample SA is adjusted smaller than±3 deg. by means of a beam shaping optical system 41, a lens system 44, and the like. Regular reflection light from the sample SA is subjected, as a detection light, to photoelectric conversion by a photomultiplier tube 64.</p>
申请公布号 JPH11211566(A) 申请公布日期 1999.08.06
申请号 JP19980030329 申请日期 1998.01.29
申请人 NIKON CORP 发明人 NIIKURA HIROSHI
分类号 G01J3/02;G01N21/27;G01N21/55;(IPC1-7):G01J3/02 主分类号 G01J3/02
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