发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device that does not cause a current failure between source and drain regions even when an active region and an insulation film for prescribing the active region could not be formed according to a layout design due to the thinning of the semiconductor device. SOLUTION: The shape of an active region 1 in terms of top view has a recessed part at its corner part. The active region 1 is surrounded by an insulation film 7. Then, a gate electrode 30 is arranged at a retreating region DR where an edge part is at a lower position due to the recessed part, and a gate electrode 20 is arranged at a normal region OR where the edge part projects from the retreating region DR. The length of the gate end cap (margin part) of the gate electrode 20 is (x) and the length of the gate end cap of the gate electrode 30 is x+α.
申请公布号 JPH11214528(A) 申请公布日期 1999.08.06
申请号 JP19980017011 申请日期 1998.01.29
申请人 MITSUBISHI ELECTRIC CORP 发明人 MIYANISHI ATSUSHI;MATSUMOTO TAKASHI
分类号 H01L29/78;H01L21/8234;H01L27/00;H01L27/02;H01L27/088;(IPC1-7):H01L21/823 主分类号 H01L29/78
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