| 摘要 |
<p>The invention includes a sensor comprising a body (1) formed from a planar substrate. The body defines a beam (2), the opposed ends of which are adapted to be fixed in position, the beam having a preferential bending direction which makes an acute angle with the plane of the planar substrate. The beam (2) carries an inertia mass comprising two arms (6, 7) interconnected by a connecting bar, the central part of the connecting bar being formed unitarily with part of the beam (2). Capacitative plates (15, 16, 18, 19) located adjacent a conductive layer on the arms (6, 7) are provided with potentials which cause the inertia mass to rotate about the axis of the connecting bar with a 'see-saw' action which, because of the configuration of the beam (2) leads to a rotational oscillation of the inertia mass in the plane of the substrate. If the arrangement is rotated about an axis coincident with the connecting bar, the inertia mass rotates about an axis coincident with the beam with an oscillating rotation. This is detected by capacitative plates (23, 24) to determine angular velocity.</p> |
