| 发明名称 |
METHOD AND APPARATUS FOR QUANTITATIVE ANALYSIS OF MIXED ACID SOLUTION IN ETCHING PROCESS AS WELL AS ETCHING CONTROL METHOD AND PREPARATION OF THE MIXED ACID SOLUTION |
| 摘要 |
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| 申请公布号 |
JPH11194120(A) |
申请公布日期 |
1999.07.21 |
| 申请号 |
JP19980222888 |
申请日期 |
1998.08.06 |
| 申请人 |
NIPPON KASEI CHEM CO LTD;MITSUBISHI CHEMICAL CORP |
发明人 |
SAWADA SATORO;KUSANO HIROMICHI;YACHI FUMIE |
| 分类号 |
G01N31/12;G01N21/33;G01N27/26;G01N33/00;H01L21/306;(IPC1-7):G01N31/12 |
主分类号 |
G01N31/12 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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