SUBSTRATE HOLDER AND SUBSTRATE TREATMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a wafer holder made of silicon wafer with tooled. SOLUTION: A wafer holder 31 is made of a silicon wafer by means of the lithography technology. The wafer holder 31 having seals 31a, 31b and a suction hole 31c sucks a wafer to be held by depressurizing between the seals 31a and 31b. Only the seals 31a and 31b, and the suction hole 31c are brought into contact with the wafer to be held.