| 摘要 |
<p>PROBLEM TO BE SOLVED: To shorten the down-time and to clear up an initial cause of a substrate damage, by providing a detecting means for detecting a substrate which is to be processed in a processing chamber, for quick recognition of abnormality with the substrate in the processing chamber. SOLUTION: Presence of a substrate 7 is confirmed by a sensor 12. If found to be normal, next operation, in other words a film forming or transportation to a rod-lock chamber by a robot, is performed. In such case, however, as a substrate 7 falls off a substrate reception pin 8 or the substrate 7 is cracked, the sensor 12 does not detect the substrate 7. Thus, just after the glass substrate 7 enters a processing chamber or film-forming is finished, the sensor 12 detects that the glass substrate 7 is not placed at a specified position of the substrate reception pin 8, and the signal prevents the next operation from performed. So, the down-time at substrate trouble in the processing chamber is shortened, while a cause of the substrate trouble is easily cleared up.</p> |
