| 摘要 |
PROBLEM TO BE SOLVED: To efficiently manufacture a cadmium sulfide film of good performance by eliminating losses of process time and energy, by forming the cadmium sulfide film on a heat-resistant substrate, and heating the substrate to a temperature which falls within a specific range for a period of time oxygen. SOLUTION: After a substrate for forming cadmium sulfide film is carried in a film forming section 18 through an air curtain 22 by means of a carrying roller 21, a cadmium sulfide film is formed on the substrate by the metal organic vapor phase growth method, etc. After the film is formed, the substrate is carried in a heat-treating section 19 and heated in an inert gas atmosphere, etc., containing oxygen. The heat treatment is performed at a temperature of 100-700 deg.C for a period of time of 0.5-30 minutes. Therefore, the occurrence of strains in the substrate and cadmium sulfide film can be suppressed and, since the heat treatment is performed in the oxygen atmosphere, the cadmium or sulfur existing in cadmium sulfide crystals can be inactivated by oxidation. |
