Korrosionsbeständiges Aluminiumbauteil für Vorrichtung zur Behandlung von Halbleitermaterialen

摘要

Corrosion of an aluminum article (such as a susceptor) exposed to corrosive halogen-containing species within semiconductor processing apparatus can be avoided by fabricating the article (510) from a high purity aluminum-magnesium alloy having an optimum magnesium content. Upon exposure of the article (510) to a halogen-containing species, a protective magnesium halide layer (512) is formed beneath the surface of the article. The protective layer (512) prevents halogens from penetrating to the base aluminum, thereby protecting the article (510) from corrosion and cracking. To protect the magnesium halide layer (512) from abrasion, the article preferably also includes a hard, cohesive coating (514) over the magnesium halide layer (512). A preferred cohesive coating (514) is aluminum oxide or aluminum nitride. The magnesium content of the aluminum article (510) should be in the range of about 0.1% to 1.5% by weight, either throughout the entire article, or at least in a region of the article beneath the surface which is to be rendered corrosion resistant. The impurity content of the aluminum should be less than 0.2%, and preferably much less.