发明名称 Multilayer material
摘要 <p>A multilayer material, including a multilayer portion which includes: at least two kinds of compound layers having different compositions from each other, each of which mainly comprises: at least one kind of element (first element) selected from the Group IVa elements, Group Va elements, and Group VIa elements in the Periodic Table, and Al, Si, C and B; and at least one kind of element (second element) selected from B, C, N and O; and a composition-modulated layer disposed between the compound layers, and having a composition such that the composition ratio (at%) of an element is changed. In the above multilayer material, the compound layer and the composition-modulated layer are periodically stacked, and the multilayer portion has a crystal lattice which is continuous during at least one period between respective layers constituting the multilayer portion.</p>
申请公布号 EP0709483(A2) 申请公布日期 1996.05.01
申请号 EP19950116913 申请日期 1995.10.26
申请人 SUMITOMO ELECTRIC INDUSTRIES, LTD. 发明人 SETOYAMA, MAKOTO;YOSHIOKA, TAKASHI;CHUDO, MASUO;SHIBATA, AKIHIKO
分类号 C23C14/02;C23C14/06;C23C16/02;C23C16/34;C23C16/36;C23C28/04;C23C30/00;(IPC1-7):C23C14/02 主分类号 C23C14/02
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