| 摘要 |
PROBLEM TO BE SOLVED: To provide a three-axis acceleration sensor that easily manufactures without a weight and a diaphragm. SOLUTION: A pair of piezoelectric ceramic elements EX1, EX2 for an acceleration detection of a X-axis direction and a pair of piezoelectric ceramic elements EY1, EY2 for an acceleration detection of a Y-axis direction are cantilever-supported at some inclination. Piezoelectric ceramic elements EX1, EX2 for the acceleration detection of the X-axis direction and Piezoelectric ceramic elements EY1, EY2 for the acceleration detection of the Y-axis direction are subjected to polarization processing so that spontaneous polarization electric charge in a direction of mutual cancellation is generated when acceleration in a Z-axis direction occurs. Piezoelectric ceramic elements EZ1, EZ2 for an acceleration detection of a Z-axis direction EZ1-EZ4 are horizontally cantilever- supported by a supporting means 1. Each piezoelectric ceramic element has a line symmetry shape at a center of a virtual centerline extending along a surface and has a shape that a width dimension becomes small as it proceeds from the fixed end part to the free end part. |
