| 摘要 |
PROBLEM TO BE SOLVED: To enhance detection accuracy of angular speed and acceleration by attaining a stabilized exciting state. SOLUTION: First and second excitation beams 21, 22 extending in the direction of x and y axes are secured at an intersection 23 to a substrate (substrate face) 10a such that they can be excited. Mass parts 31a-32b are arranged at the forward end of a beam and detecting electrodes 61a-62b are arranged in the center of the mass parts 31a-32b oppositely thereto. An electrostatic force acting between each exciting electrode 41a-42s and each mass section oscillates the mass parts 31a, 31b and 32a, 32b, respectively, in the direction of x and y axes. When an angular speedΩx acts about the x axis under that oscillatory state, Coriolis forces F1a , F1b act in the direction of z axis on the mass parts 31a, 31b and when an angular speedΩy acts about the y axis, Coriolis forces F2a , F2b act in the direction of z axis on the mass parts 32a, 32b. Consequently, the beam oscillates in the direction of z axis and each angular speed is detected by detecting the oscillation through the detecting electrodes.
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