TUNABLE OPTICAL DEVICE

摘要

A method of fabricating a tunable optical device, and a device fabricated according to the method, where the tuning means include a liquid crystal material (5) in an enclosed cavity (3) fabricated over an optical element (1), typically a waveguide, and the cavity is created by the removal, through selective etching, of a layer of quaternary indium gallium arsenide phosphide (18) through a slot (8) etched in a layer of indium phosphide (4) formed over the quaternary layer.