发明名称 SIDEWALL REMOVING LIQUID
摘要 PROBLEM TO BE SOLVED: To provide a sidewall-removing liquid capable of removing a sidewall at low temperatures and in a short period of time without corroding wiring materials. SOLUTION: This removing liquid comprises at least one alkanol amine selected from among a group comprising monoethanol amine, diethanol amine, triethanol amine, N-methyl-diethanol amine, and N,N-dimethl-monoethanol amine, at least one organic acid selected from among a group comprising formic acid, acetic acid, propionic acid, butyric acid, lactic acid, and benzoic acid, and water.
申请公布号 JPH11174690(A) 申请公布日期 1999.07.02
申请号 JP19970340026 申请日期 1997.12.10
申请人 TOKUYAMA SEKIYU KAGAKU KK 发明人 SUGIYAMA TSUTOMU
分类号 G03F7/42;C11D7/22;C11D7/60;H01L21/027;(IPC1-7):G03F7/42 主分类号 G03F7/42
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