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经营范围
发明名称
A GAS PORT OF CVD MACHINE
摘要
申请公布号
KR100205541(B1)
申请公布日期
1999.07.01
申请号
KR19950051495
申请日期
1995.12.18
申请人
SAMSUNG ELECTRONICS CO, LTD.
发明人
LEE, NAM-JIN;CHOI, SANG-KUK;KO, HOECK-JUN;KWAN, JUNG-WHAN
分类号
H01L21/205;C23C16/44;C23C16/455;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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