| 摘要 |
PROBLEM TO BE SOLVED: To provide a non-contact type conveying device for preventing spherical articles from coming into contact with a tubular inner surface, when a spherical article such as a spherical silicon-made semiconductor element is conveyed with fluid through a tubular article such as a pipe. SOLUTION: This non-contact type conveying device for spherical articles is provided with a spiral flow generating means for generating the spiral flow of fluid and introduces the fluid spiral flow generated by the spiral flow generating means to a passage for spherical articles. In this spiral flow generating means, a conveying passage 2 is provided in the axial direction, a rotatable rotary shaft 3 in which the spiral grooves 3b are provided on the specified parts on the outer peripheral surface, and an injection pipe 3a for connecting the conveying passage 2 and the spiral grooves 3b to each other is provided on the rotary shaft 3. |
