发明名称 |
METHOD AND DEVICE FOR PRODUCTION OF COMPONENTS FOR MICROFABRICATION |
摘要 |
Atomized particles within a desired size range (e.g.., 1 micron to about 5 microns) are produced from two immiscible fluids, a first fluid source containing the formulation to be atomized, and a second fluid source which is contained in a pressure chamber surrounding at least the area where the first liquid is to be provided. The invention provides methods for: the production of templates for microfabrication, such as particles that serve as templates for self-assembly of monolayers; the creation of small particles to serve as building blocks for the microassembly of objects; and the use of an atomizate to etch configurations and/or patterns onto the surface of an object by removing a selected portion of the surface.
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申请公布号 |
WO9930835(A1) |
申请公布日期 |
1999.06.24 |
申请号 |
WO1998IB02056 |
申请日期 |
1998.12.16 |
申请人 |
UNIVERSIDAD DE SEVILLA;GANAN CALVO, ALFONSO |
发明人 |
GANAN CALVO, ALFONSO |
分类号 |
B82B3/00;A61M15/00;B01F3/04;B01F5/04;B01J19/00;B05B1/02;B05B7/04;B05B7/06;B05B7/08;B81C1/00;B82B1/00;C08J3/12;C12M1/00;C12N15/09;C23F1/00;C40B60/14;F02M43/04;F02M67/10;F02M69/04;F02M69/08;F23D11/10;G01N15/14;G01N21/01;(IPC1-7):B05B7/06 |
主分类号 |
B82B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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