| 摘要 |
PROBLEM TO BE SOLVED: To inspect defects such as the presence or absence of a resist reliably even if the state of the surface of a substrate is changed. SOLUTION: An illumination system driving device 3 and a detection system driving device 5 are operated to adjust the angle of incidenceθi of illumination light to a substrate to be inspected W and the angle of diffractionθd of reflected light from the substrate W. Next, a motor 70 is driven to rotate an ND filter 24, and the intensity of illumination light incident on the substrate to be inspected W is set to reference intensity stored on a reference substrate W, Next, the image of the substrate to be inspected W picked up by a CCD camera 43 is captured in a control device 6 and is stored in an internally provided storage device. Next, in the control device 6, the picked-up image of the substrate to be inspected W is compared with the image of the reference substrate W to detect a defect part. In addition, the intensity of illumination light incident on the substrate to be inspected W is maintained constant at all times as reference intensity. Moreover, the sensitivity of the CCD camera 43 is fixed at a constant value.
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