METHOD AND APPARATUS FOR CLEANING CHAMBER,申请号JP19970333166-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR CLEANING CHAMBER
摘要
申请公布号	JPH11167890(A)	申请公布日期	1999.06.22
申请号	JP19970333166	申请日期	1997.12.03
申请人	JEOL LTD	发明人	TAMAI MAKOTO
分类号	G03F7/20;H01J37/18;(IPC1-7):H01J37/18	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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