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发明名称
Dry etching process of III-V-semiconductor
摘要
申请公布号
SE9902344(D0)
申请公布日期
1999.06.21
申请号
SE19990002344
申请日期
1999.06.21
申请人
CARL-FREDRIK CARLSTROEM;GUNNAR LANDGREN;SRINIVASAN ANAND
发明人
CARL-FREDRIK *CARLSTROEM;GUNNAR *LANDGREN;SRINIVASAN *ANAND
分类号
C23F;(IPC1-7):C23F/
主分类号
C23F
代理机构
代理人
主权项
地址
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