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发明名称
SEMICONDUCTOR MANUFACTURING APPARATUS AND CHAMBER
摘要
申请公布号
JPH11162838(A)
申请公布日期
1999.06.18
申请号
JP19970342299
申请日期
1997.11.27
申请人
NIKON CORP
发明人
FUJITA HIROSUKE
分类号
H01L21/027;H01L21/02;H05F3/02;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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