发明名称 PRODUCTION OF MULTILAYER WIRING BOARD
摘要 PROBLEM TO BE SOLVED: To produce a fine high density build-up wiring board by making a wiring groove in an insulating resin layer formed on a basic material and adsorbing metal colloid, forming a metal film using a conductive layer as cathode and polishing the metal film and then removing the metal film and the metal colloid except the inside of the groove. SOLUTION: A coating of photosensitive varnish for forming an interlayer insulating resin layer 5 is provided on a wiring board comprising a basic material 1, i.e., a copper clad polyimide laminated board, and a first wiring layer 2. It is then dried and via holes are made in the resin before being hardened through polymerization. Subsequently, an interlayer insulating resin layer 7 is formed. Surface of the resin layers 5, 7 is then roughened by making irregularities at high density in order to facilitate adsorption of colloid in subsequent steps and immersed into a cationic surfactant solution thus adsorbing cations to the surface of the board. Finally, it is immersed into an alkaline carbonate solution in order to reduce the adsorbed colloid thus forming a conductive layer. According to the method, wiring and vias 10 can be embedded flatly in a resin.
申请公布号 JPH11163520(A) 申请公布日期 1999.06.18
申请号 JP19970331822 申请日期 1997.12.02
申请人 TOSHIBA CORP 发明人 HIGUCHI KAZUTO;MIYAGI TAKESHI
分类号 H05K3/46;(IPC1-7):H05K3/46 主分类号 H05K3/46
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