SEMI CONDUCTOR ACCELEROMETER

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor accelerometer which can prevent its flexure part from being damaged even when it is dropped mistakenly. SOLUTION: An accelerometer is provided with a body 1 in which a tube body 11 comprising a tube axis 11a is installed, and in which a flange 12 installed on a placement face 12a so as to protrude to a direction nearly at right angles to the tube axis 11a from a base end part 11b of the tube body 11 is placed on an apparatus 3 whose acceleration is to be detected and with a semiconductor sensor part in which a flexure part used to generate a flexure when an acceleration is applied is installed, in which the flexure part is cantilever-supported and which is housed in the tube body 11 on the side of the base end part 11b. On the basis of the flexure of the flexure part, the semiconductor sensor detects the acceleration applied to the apparatus 3 to be detected. In this case, an impact absorption part 12b which absorbs an impact force at a time when the accelerometer is dropped is installed at the flange part 12.