A method of detecting the position of a wafer,申请号GB19990008951-传众专利搜索

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发明名称	A method of detecting the position of a wafer
摘要
申请公布号	GB9908951(D0)	申请公布日期	1999.06.16
申请号	GB19990008951	申请日期	1999.04.19
申请人	APPLIED MATERIALS INC	发明人
分类号	G01B11/00;B25J9/10;B25J9/22;B25J19/00;B25J19/02;H01L21/00;H01L21/68	主分类号	G01B11/00
代理机构		代理人
主权项
地址

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