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发明名称
METHOD FOR COLLECTING DUST OF CLEAN ROOM
摘要
申请公布号
JPH11156135(A)
申请公布日期
1999.06.15
申请号
JP19970325549
申请日期
1997.11.27
申请人
HITACHI CHEM CO LTD
发明人
SHIMOKAWABE YOSHIFUMI
分类号
F24F7/06;B01D47/02;(IPC1-7):B01D47/02
主分类号
F24F7/06
代理机构
代理人
主权项
地址
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