| 摘要 |
PROBLEM TO BE SOLVED: To provide the polishing equipment capable of efficiently carrying out cooling for a polishing tool such as a cloth for highly flatening a material to be polished, and having simple configuration for easy maintenance. SOLUTION: This polishing equipment is provided with a turntable 12 rotatably supported on a rotary shaft, a polishing tool 11 installed to cover one surface side of the turntable 12, and a cooling medium passages 19 provided along the polishing tool 11 and user for cooing the polishing tool 11. The cooling medium passages 19 are designed to deliver and receive a cooling medium through a rotating fluid joint 20 provided at the side opposite the rotary shaft of the turntable 12. |
