DRYING METHOD OF WAFER AND APPARATUS THEREFOR,申请号KR19960000904-传众专利搜索

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发明名称	DRYING METHOD OF WAFER AND APPARATUS THEREFOR
摘要
申请公布号	KR100198888(B1)	申请公布日期	1999.06.15
申请号	KR19960000904	申请日期	1996.01.04
申请人	POSCO HULS CO.,LTD.	发明人	CHOI, MOON-NO;LEE, YOUNG-GEUN;JUN, YANG-JA
分类号	H01L21/304;(IPC1-7):H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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