发明名称 HEATER STAGE
摘要 PROBLEM TO BE SOLVED: To provide a heater stage which can effectively prevent formation of a polarization voltage on a pyroelectric substrate, breakage of the substrate due to a potential difference caused by the polarization voltage, short-circuiting of a pattern on the surface of the substrate, etc., by raising temperature of the substrate from a room temperature to a prescribed high temperature and dropping the temperature from the high temperature to the room temperature in stages, and making the temperature gradient gentle without causing a decline in productivity by longer heater state occupying time when it is required to heat the substrate to the high temperature as in the case of forming bumps on the surface of the substrate. SOLUTION: A heater stage is provided with a plurality of heater blocks 1a, 1b, 1c, and 1d which are arranged in a prescribed arrangement and respectively set to different temperatures and transferring means 4 and 5 which successively transfer a pyroelectric substrate onto the heater blocks. A temperature of the pyroelectric substrate is raised or dropped in stages by successively placing and transferring the substrate on and to the heater blocks 1a, 1b, 1c, and 1d which are set to different temperatures so as to raise or drop the temperature of the substrate in stages.
申请公布号 JPH11150313(A) 申请公布日期 1999.06.02
申请号 JP19970332452 申请日期 1997.11.17
申请人 TOYO COMMUN EQUIP CO LTD 发明人 IWATA KOICHI
分类号 H05B3/00;H01L41/22 主分类号 H05B3/00
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