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发明名称
CLEANING APPARATUS FOR REMOVING ORGANIC MATTER OF SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
KR100190081(B1)
申请公布日期
1999.06.01
申请号
KR19960034510
申请日期
1996.08.20
申请人
SAMSUNG ELECTRONICS CO, LTD.
发明人
KO, YONG-SUN
分类号
(IPC1-7):H01L21/341
主分类号
(IPC1-7):H01L21/341
代理机构
代理人
主权项
地址
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