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发明名称
MANUFACTURE OF COMPOUND SEMICONDUCTOR
摘要
申请公布号
JPH11145059(A)
申请公布日期
1999.05.28
申请号
JP19970303869
申请日期
1997.11.06
申请人
FUJITSU LTD
发明人
YOKOYAMA MITSUNORI
分类号
H01L21/205;H01L21/338;H01L29/812;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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