| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a performance board for improving reliability in data and reducing the damages of a tester as much as possible in an electrical die sorting(EDS) process by accurately supporting the performance board in a horizontal state. SOLUTION: A performance board 20 includes an upper board 24 mounted on a tester unit 20 for generating an electrical signal, an lower board 26 put in contact with a prober for feeding the electrical signal to the prober, and a joining unit 28 for joining the upper board 24 and the lower board 26 and having a means for moving the lower board with respect to the upper board. Then, the performance board 20 is held accurately in a horizontal state, and reliability of data is improved, and damages on the tester is reduced as much as possible in an electrical die sorting(EDS) process.</p> |
