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发明名称
BUMP BONDING DEVICE AND METHOD THEREFOR
摘要
申请公布号
JPH11145175(A)
申请公布日期
1999.05.28
申请号
JP19970308519
申请日期
1997.11.11
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
YONEZAWA TAKAHIRO;KANAYAMA SHINJI;YAMAMOTO AKIHIRO;IMANISHI MAKOTO;YOSHIDA KOICHI
分类号
H01L21/60;(IPC1-7):H01L21/60
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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