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发明名称
INSPECTION DEVICE FOR LIQUID CRYSTAL DISPLAY SUBSTRATE
摘要
申请公布号
JPH11142802(A)
申请公布日期
1999.05.28
申请号
JP19970308983
申请日期
1997.11.11
申请人
SHARP CORP
发明人
NAKAGAWA TOSHIHIKO
分类号
G01R31/00;B65G49/06;G01M11/00;G02F1/13;G02F1/1333;(IPC1-7):G02F1/13;G02F1/133
主分类号
G01R31/00
代理机构
代理人
主权项
地址
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