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发明名称
METHOD FOR IMPROVING THERMAL STABILITY OF METALLIC POLYCIDE STRUCTURE
摘要
申请公布号
JPH11135454(A)
申请公布日期
1999.05.21
申请号
JP19980234050
申请日期
1998.08.20
申请人
INTERNATL BUSINESS MACH CORP <IBM>;SIEMENS AG
发明人
AJMERA ATUL C;DEHM CHRISTINE;DOMENICUCCI ANTHONY G;GIFFORD GEORGE G;LOH STEPHEN K;PARKS CHRISTOPHER;SARDESAI VIRAJI Y
分类号
H01L21/28;H01L29/49;(IPC1-7):H01L21/28
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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