| 摘要 |
PROBLEM TO BE SOLVED: To make adjustable an optical system easily so as to enable highly precise inspection. SOLUTION: A workpiece W (QFP type IC) is arranged on an inspection stage and is illuminated by a light source through a diffusion plate 6 from below, and image in the vertical and horizontal directional and in the direction of height of the workpiece W are photographed by a camera 1 at the same time by reflecting the image of the side face of the workpiece W upward by a mirror part 7. An image processing block 2 detects a predetermined section from the image obtained by photographing a jig whose dimension of the predetermined section is measured in advance by the camera 1. A coordinate system of the image photographed by the camera 1 is compensated based on coordinates obtained by measuring the dimension of the predetermined section and coordinates obtained by the detection, and a virtual plane with which a lead comes in contact is obtained using the value detecting the predetermined section in the compensated coordinate system to calculate the floating amount of the lead based on the distance between the virtual plane and the lead. Consequently, the adjustment of an optical system can be done easily, and highly precise inspection becomes possible. |
