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发明名称
Plasma CVD method and apparatus therefor
摘要
申请公布号
EP0574100(B1)
申请公布日期
1999.05.12
申请号
EP19930250088
申请日期
1993.03.22
申请人
MITSUBISHI JUKOGYO KABUSHIKI KAISHA
发明人
MURATA, MASAYOSHI;TAKEUCHI, YOSHIAKI
分类号
C23C16/24;C23C16/509;H01J37/32;(IPC1-7):C23C16/50
主分类号
C23C16/24
代理机构
代理人
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