Diaphragm pump having multiple rigid layers with inlet and outlet check valves

摘要

An integral valve diaphragm pump has a first rigid layer, a second rigid layer and a flexible membrane therebetween. Concave surfaces in the two rigid layers form a pump. The pump includes an actuating chamber which is alternately connected to a source of pressure and a source of vacuum. A pump chamber is connected to a fluid source and a fluid receiver through a filling check valve and a dispensing check valve, respectively. Duckbill and spring loaded ball check valves are disclosed.