CATHODE ARC SOURCE WITH TARGET FEEDING APPARATUS

摘要

Apparatus for feeding a target into a chamber of a cathode arc source, comprises support structure (22, 23, 24) attached to or integral with the cathode arc source (10), a cathode station (16, 17, 18) for receiving a target (18) in electrical connection with an arc power supply, wherein the cathode station is mounted for movement (21, 37) on the support structure, and means for movement of the cathode station (21, 37) relative to the chamber so as to feed the target into the chamber. The apparatus can also have means (27) in the chamber for removing an upper portion of the target. A graphite target for feeding into the source is a composite of at least inner and outer sections, said inner section comprising graphite powder and having a density in the range 1.7-2.0 g/cm<3> and said outer section comprising graphite powder and having a density that is at least 0.1 g/cm<3> less than that of the inner section.