发明名称 |
Aluminum nitride heater |
摘要 |
<p>A ceramic heater according to the present invention includes a substrate (1) consisting of an aluminum nitride sintered body, and a heating element (2) and a feed electrode (3), mainly composed of silver or a silver alloy, formed on a surface of the substrate (1). The aluminum nitride sintered body contains a group 2A or 3A element in the periodic table or a compound thereof and silicon or a silicon compound of 0.01 to 0.5 percent by weight in terms of the silicon element, and preferably further contains a group 8 transition element or a compound thereof by 0.01 to 1 percent by weight in terms of the element. <IMAGE></p> |
申请公布号 |
EP0914022(A2) |
申请公布日期 |
1999.05.06 |
申请号 |
EP19980308840 |
申请日期 |
1998.10.28 |
申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LTD. |
发明人 |
NATSUHARA, MASUHIRO;NAKATA, HIROHIKO;YUSHIO, YASUHISA |
分类号 |
H05B3/20;H05B3/12;H05B3/14;H05B3/16;H05B3/26;(IPC1-7):H05B3/16 |
主分类号 |
H05B3/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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