发明名称 |
STRUCTURE EQUIPPED WITH ELECTRIC CONTACTS FORMED THROUGH SAID STRUCTURE SUBSTRATE AND METHOD FOR OBTAINING SAID STRUCTURE |
摘要 |
The invention concerns a structure to be equipped with at least one electric contact formed in a layer (24), on the front surface side thereof. Said layer is formed on a substrate (20) which is bored with at least one hole (28) to expose the layer rear surface. The contact (32) is formed thereon opposite the hole, in a cavity overhung by the hole edge closest to the first layer, said overhang enabling to insulate electrically the substrate contact. The invention is applicable to accelerometers, pressure sensors and actuators. |
申请公布号 |
WO9922212(A1) |
申请公布日期 |
1999.05.06 |
申请号 |
WO1998FR02286 |
申请日期 |
1998.10.26 |
申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE;CAPLET, STEPHANE;DELAYE, MARIE-THERESE |
发明人 |
CAPLET, STEPHANE;DELAYE, MARIE-THERESE |
分类号 |
G01B7/00;G01L9/00;H01L21/768;H01L23/48;(IPC1-7):G01L9/00;G01P15/08 |
主分类号 |
G01B7/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|