发明名称 STRUCTURE EQUIPPED WITH ELECTRIC CONTACTS FORMED THROUGH SAID STRUCTURE SUBSTRATE AND METHOD FOR OBTAINING SAID STRUCTURE
摘要 The invention concerns a structure to be equipped with at least one electric contact formed in a layer (24), on the front surface side thereof. Said layer is formed on a substrate (20) which is bored with at least one hole (28) to expose the layer rear surface. The contact (32) is formed thereon opposite the hole, in a cavity overhung by the hole edge closest to the first layer, said overhang enabling to insulate electrically the substrate contact. The invention is applicable to accelerometers, pressure sensors and actuators.
申请公布号 WO9922212(A1) 申请公布日期 1999.05.06
申请号 WO1998FR02286 申请日期 1998.10.26
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE;CAPLET, STEPHANE;DELAYE, MARIE-THERESE 发明人 CAPLET, STEPHANE;DELAYE, MARIE-THERESE
分类号 G01B7/00;G01L9/00;H01L21/768;H01L23/48;(IPC1-7):G01L9/00;G01P15/08 主分类号 G01B7/00
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