Verfahren zur Positionierung eines Werkstückes in einem automatischen Belichtungsapparat

摘要

A work locating method for an automatic exposing apparatus is provided. In addition to a step of delivering a work (W) from a feed-in section (50) onto an alignment table (13a) on an alignment stand (16) in a locating section (40) which is provided separately from an exposing section (30), and subjecting the work (W) to an automatic alignment operation and a step of fixing the alignment table (13a) mounting the work (W) thereon to a traverser (1) which is fixed with a photomask (8) and is displaced from the exposing section (30) to the locating section (40) by vacuum suction and checking the automatic alignment thereof, the work locating method further includes a step of displacing a forklifter (22) disposed in the exposing section to the locating section (40) to deliver an alignment table (13b) mounted thereon onto an alignment stand (16) during an exposure process and allowing the forklifter to return to an original position in the exposing section (30) before the exposure process is completed, thereby performing the work locating operation with high alignment accuracy between the work and the photomask and high efficiency in the automatic exposure process.