发明名称
摘要 <p>PURPOSE:To facilitate accurate record and display of manufacturing operation results by a method wherein manufacturing processes and manufacturing conditions are indicated on a display provided in an instruction apparatus for an operator and the manufacturing processes and manufacturing conditions are instructed to both the operator and a manufacturing apparatus. CONSTITUTION:When an operator refers to manufacturing conditions to start an operation, the operator pushes the process indication key 211 of an instruction apparatus 201 to display the manufacturing type of a product to be in the process, a manufacturing number, the process to be in operation and processes before and after the present process. The instruction apparatus 201 is connected to a manufacturing apparatus 301 with an instruction data communication interface 303 and the output of the instruction apparatus 201 is converted into the signal of the control computer 302 of the manufacturing apparatus 301 to give the manufacturing conditions to the manufacturing apparatus 301. With this constitution, the manufacturing conditions of the product are accurately instructed to both the manufacturing apparatus and the operator.</p>
申请公布号 JP2886240(B2) 申请公布日期 1999.04.26
申请号 JP19900037372 申请日期 1990.02.20
申请人 HITACHI SEISAKUSHO KK 发明人 SAKATA MASAO;NAKAZATO JUN;TAKAHASHI SHIGERU;MAEDA KAZUHIKO;IWASAKI TAKEMASA;SHIMOSHA SADAO;KUBONAI KOICHI;MORIKAWA KANJI;OKABE TSUTOMU
分类号 H01L21/67;H01L21/02;H01L21/677;H01L21/68;(IPC1-7):H01L21/02 主分类号 H01L21/67
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