| 摘要 |
PROBLEM TO BE SOLVED: To constitute an ultrasonic motor that can stably operate when using it in air and vacuum, by transferring power to a body to be driven via a sliding member consisting of a material where a melt point or thermal decomposition temperature exceeds a specific value. SOLUTION: An ultrasonic motor 1 transfers a driving torque to the sliding surface of a rail 11 that is a body to be driven via sliding members 10 and 10' being allowed to adhere on the tip surface of leg parts 2 and 2' of a vibration body 4, and reciprocates the rail 11. In this case, the sliding members 10 and 10' where a melt point or thermal decomposition temperature exceeds 640 deg.C are used. For example, the sliding members 10 and 10' where martensitic stainless steel is hardened, Vickers hardness is set to 900, and the melt point is set to 1,500 deg.C or more are used. The Vickers hardness and melt point of aluminum being used as the rail 11 are set to 1,800 and 2,000 deg.C, respectively, thus obtaining ideal position accuracy when the ultrasonic motor 1 is used in vacuum in an electronic wire projection aligner and a driving device. |
