发明名称 |
RESONANCE COMPENSATION IN SCANNING PROBE MICROSCOPY |
摘要 |
A method includes generating, using a sensor, a data signal. The data signal includes a first component based on a motion in a first direction of an actuator configured to provide motion between a sample and a probe in the first direction, the first direction substantially in the plane of the sample; and a second component based on at least one of topographic variations of the sample in a second direction, and a materials property of the sample. The method further includes generating, using a processor, a compensatory signal based on the first component of the data signal generated by the sensor; and providing the compensatory signal to the actuator. |
申请公布号 |
EP2577326(A2) |
申请公布日期 |
2013.04.10 |
申请号 |
EP20110787117 |
申请日期 |
2011.05.13 |
申请人 |
MASSACHUSETTS INSTITUTE OF TECHNOLOGY |
发明人 |
BURNS, DANIEL, JAMES;FANTNER, GEORG, ERNEST;YOUCEF-TOUMI, KAMAL |
分类号 |
G01Q10/06 |
主分类号 |
G01Q10/06 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|