Carrier table for a photo mask in a microchip manufacturing arrangement

摘要

The carrier table (4) has a rectangular plate of glass or glass ceramic with a bore in the upper surface for positionally accurately holding the photo mask (3) and material removal apertures (11) in the top and/or bottom surfaces for wt. reduction and/or stiffening. Material removal apertures in the edge region of both long sides of the plate form longitudinal end bores (12a,12b) extending along the plane of the plate.