| 摘要 |
PCT No. PCT/DE95/00499 Sec. 371 Date Sep. 24, 1996 Sec. 102(e) Date Sep. 24, 1996 PCT Filed Apr. 11, 1995 PCT Pub. No. WO95/29383 PCT Pub. Date Nov. 2, 1995For a micromechanical resonator of a vibration gyrometer, the two resonating masses, which vibrate in phase opposition and are joined across a coupling region, are suspended by at least one suspension spring. The suspension springs are thereby designed to be soft in the direction of vibration and substantially harder in all other degrees of freedom. This allows the moment of rotation of the rate of rotation (absolute angular velocity) to be transferred to the resonating masses. Interference signals when measuring Coriolis forces are suppressed by means of subtraction. The resonator is patterned out of a semiconductor material and can be excited to vibrate in the electrostatic or electromagnetic field by means of suitable current supply leads.
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